COMPLEX-FORMATION AND GROWTH AT THE CR-POLYIMIDE AND CU-POLYIMIDE INTERFACE

被引：163
作者：
HAIGHT, R
WHITE, RC
SILVERMAN, BD
HO, PS
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 04期
关键词：
D O I：
10.1116/1.575010
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：2188 / 2199
页数：12
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