PRECIPITATION AND DIFFUSIVITY OF ARSENIC IN SILICON

被引：25

作者：

ANGELUCCI, R

CELOTTI, G

NOBILI, D

SOLMI, S

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1985年 / 132卷 / 11期

关键词：

D O I：

10.1149/1.2113654

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2726 / 2730

页数：5

共 15 条

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