HIGH-SPEED ELECTROPLATING OF COPPER USING THE LASER-JET TECHNIQUE

被引：18
|
作者：
VONGUTFELD, RJ
VIGLIOTTI, DR
机构：
来源：
APPLIED PHYSICS LETTERS | 1985年 / 46卷 / 10期
关键词：
D O I：
10.1063/1.95814
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1003 / 1005
页数：3
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