ELECTRICAL AND OPTICAL-PROPERTIES OF ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING FOR TRANSPARENT ELECTRODE APPLICATIONS

被引：215
|
作者：
NANTO, H
MINAMI, T
SHOOJI, S
TAKATA, S
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 04期
关键词：
D O I：
10.1063/1.333196
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1029 / 1034
页数：6
相关论文
共 50 条
  • [41] PYROELECTRIC PROPERTIES AND APPLICATIONS OF SPUTTERED ZINC-OXIDE THIN-FILMS
    POLLA, D
    MULLER, RS
    WHITE, RM
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1986, 33 (01) : 98 - 98
  • [42] HIGHLY CONDUCTIVE AND TRANSPARENT ZINC-OXIDE FILMS PREPARED BY RF MAGNETRON SPUTTERING UNDER AN APPLIED EXTERNAL MAGNETIC-FIELD
    MINAMI, T
    NANTO, H
    TAKATA, S
    APPLIED PHYSICS LETTERS, 1982, 41 (10) : 958 - 960
  • [43] Optical and electrical properties of doped zinc oxide films prepared by ac reactive magnetron sputtering
    Szyszka, B
    Jager, S
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1997, 218 : 74 - 80
  • [44] Optical and electrical properties of doped zinc oxide films prepared by ac reactive magnetron sputtering
    Szyszka, B.
    Jaeger, S.
    Journal of Non-Crystalline Solids, 1997, 218 : 74 - 80
  • [45] Electronic, Optical and Electrical Properties of Nickel Oxide Thin Films Grown by RF Magnetron Sputtering
    Park, Chanae
    Kim, Juhwan
    Lee, Kangil
    Oh, Suhk Kun
    Kang, Hee Jae
    Park, Nam Seok
    APPLIED SCIENCE AND CONVERGENCE TECHNOLOGY, 2015, 24 (03): : 72 - 76
  • [46] Structural and optical properties of zinc nitride films prepared by rf magnetron sputtering
    Yang, Tianlin
    Zhang, Zhisheng
    Li, Yanhui
    Lv, MaoShui
    Song, Shumei
    Wu, Zhongchen
    Yan, Jincheng
    Han, Shenghao
    APPLIED SURFACE SCIENCE, 2009, 255 (06) : 3544 - 3547
  • [47] CONDUCTIVE AND TRANSPARENT AL-DOPED ZNO THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING
    CHEN, YI
    DUH, JG
    MATERIALS CHEMISTRY AND PHYSICS, 1991, 27 (04) : 427 - 439
  • [48] ALUMINUM-DOPED AND INDIUM-DOPED ZINC-OXIDE THIN-FILMS PREPARED BY DC MAGNETRON REACTIVE SPUTTERING
    HARDING, GL
    WINDOW, B
    HORRIGAN, EC
    SOLAR ENERGY MATERIALS, 1991, 22 (01): : 69 - 91
  • [49] Transparent conducting zirconium-doped zinc oxide films prepared by rf magnetron sputtering
    Lv, M
    Xiu, XW
    Pang, ZY
    Dai, Y
    Han, SH
    APPLIED SURFACE SCIENCE, 2005, 252 (05) : 2006 - 2011
  • [50] Influence of the sputtering pressure on the properties of transparent conducting zirconium-doped zinc oxide films prepared by RF magnetron sputtering
    刘汉法
    张化福
    类成新
    袁长坤
    半导体学报, 2009, 30 (02) : 17 - 20
12345