DAMAGE ACCUMULATION IN CERAMICS DURING ION-IMPLANTATION

被引：56

作者：

MCHARGUE, CJ

FARLOW, GC

BEGUN, GM

WILLIAMS, JM

WHITE, CW

APPLETON, BR

SKLAD, PS

ANGELINI, P

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 16卷 / 2-3期

关键词：

D O I：

10.1016/0168-583X(86)90016-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：212 / 220

页数：9

共 35 条

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[3]

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[8]

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