THE STABILITY OF ZINC-OXIDE TRANSPARENT ELECTRODES FABRICATED BY RF MAGNETRON SPUTTERING

被引：121
作者：
MINAMI, T
NANTO, H
SHOOJI, S
TAKATA, S
机构：
来源：
THIN SOLID FILMS | 1984年 / 111卷 / 02期
关键词：
D O I：
10.1016/0040-6090(84)90484-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：167 / 174
页数：8
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