STRUCTURAL-CHANGES CLOSE TO THE UNWORKED SIDE OF SILICON-WAFERS DUE TO GRINDING ON THE OPPOSITE SIDE

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作者：
PEREVOSHCHIKOV, VA
SKUPOV, VD
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SOVIET JOURNAL OF OPTICAL TECHNOLOGY | 1987年 / 54卷 / 06期
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O43 [光学];
学科分类号：
070207 ; 0803 ;
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页码：361 / 362
页数：2
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