SCANNING DIFFERENTIAL INTERFERENCE CONTRAST MICROSCOPE

被引：0

作者：

BANKHEAD, AD

机构：

[1] GEC Ferranti Defence Systems Ltd., Edinburgh, Scotland

来源：

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1992年 / 14卷 / 04期

关键词：

OPTICAL MICROSCOPES; LIGHT INTERFEROMETERS; SURFACE ROUGHNESS;

D O I：

10.1016/0141-6359(92)90017-Q

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An optical microscope has been developed based on the differential interference contrast method to evaluate the roughness of supersmooth surfaces. The instrument uses a Bragg cell and a translation stage driven by a DC motor to produce an image of an area of a sample. Its lateral resolution is 2 mum and its vertical resolution is subangstrom. It takes only 7 seconds to scan an area of 1 mm2. Three different curve fits can be used to remove the tilt, the curvature, and the low spatial frequency features of the sample. A figure for surface roughness is produced that is repeatable to 0.01 angstrom. The instrument is described and the noise sources and repeatability are discussed. The results of measurements of ring laser gyroscope mirror substrates are shown.

引用

页码：196 / 205

页数：10

共 10 条

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