EFFECT OF OXYGEN ON MINORITY-CARRIER LIFETIME AND RECOMBINATION CURRENTS IN SI1-XGEX HETEROSTRUCTURE DEVICES

被引:27
作者
GHANI, T [1 ]
HOYT, JL [1 ]
NOBLE, DB [1 ]
GIBBONS, JF [1 ]
TURNER, JE [1 ]
KAMINS, TI [1 ]
机构
[1] HEWLETT PACKARD CO,PALO ALTO,CA 94303
关键词
D O I
10.1063/1.104296
中图分类号
O59 [应用物理学];
学科分类号
摘要
A p+-i-n diode structure is presented which is suitable for determining the recombination lifetime in thin Si(1-x)Ge(x) layers grown on Si. Electrical measurements and computer simulations are used to extract carrier lifetimes in Si(1-x)Ge(x) layers with various oxygen concentrations. The minority-carrier lifetime increases dramatically as the oxygen concentration in the Si(1-x)Ge(x) decreases from 3 X 10(20) to less than 3 X 10(17) cm-3. Lifetimes extracted from the p+-i-n diodes are consistent with those obtained from measurements on heterojunction bipolar transistors with high oxygen concentrations in the Si1-xGex base.
引用
收藏
页码:1317 / 1319
页数:3
相关论文
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