ETCHING OF DEEP GROOVES FOR THE PRECISE POSITIONING OF CLEAVES IN SEMICONDUCTOR-LASERS

被引：14
作者：
BOWERS, JE [1 ]
HEMENWAY, BR [1 ]
WILT, DP [1 ]
机构：
[1] AT&T BELL LABS,MURRAY HILL,NJ 07974
来源：
APPLIED PHYSICS LETTERS | 1985年 / 46卷 / 05期
关键词：
D O I：
10.1063/1.95609
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：453 / 455
页数：3
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