THICK-FILM PRESSURE SENSORS

被引：10

作者：

HARSANYI, G

HAHN, E

机构：

[1] Techn. Univ. Budapest, Dept. Electr. Techn.

来源：

MECHATRONICS | 1993年 / 3卷 / 02期

关键词：

D O I：

10.1016/0957-4158(93)90047-6

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A new type of pressure sensor has been developed by taking advantage of the piezoresistive effect in polymer thick-film resistors screened and cured on epoxy-glass diaphragms. The device looks promising to satisfy all the requirements: low cost, high sensitivity and low thermal drift. The piezoresistive effect in polymer thick-film (PTF) resistors is discussed in comparison with cermet thick-films. The possibility of making a high-performance PTF pressure sensor is theoretically supported. Characteristics of the newly developed polymer thick-film sensor are described. In a limited temperature range, the new sensor has parameters that are not worse than those of the cermet thick-film pressure sensor and at a much reduced cost.

引用

页码：167 / 171

页数：5