MICROSCOPIC MODEL FOR THE ABLATIVE PHOTODECOMPOSITION OF POLYMERS BY FAR-ULTRAVIOLET RADIATION (193 NM)

被引：127

作者：

GARRISON, BJ ^{[1
]}

SRINIVASAN, R ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 09期

关键词：

D O I：

10.1063/1.94947

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：849 / 851

页数：3

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共 10 条

[1] DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER
ANDREW, JE
DYER, PE
FORSTER, D
KEY, PH
[J]. APPLIED PHYSICS LETTERS, 1983, 43 (08) : 717 - 719
[2] A CLASSICAL DYNAMICS MODEL OF PLASMA DESORPTION MASS-SPECTROMETRY EXPERIMENTS
GARRISON, BJ
[J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1983, 105 (03) : 373 - 378
[3] ENERGY AND ANGLE RESOLVED SIMS STUDIES OF CO ON NI(001)
GIBBS, RA
HOLLAND, SP
FOLEY, KE
GARRISON, BJ
WINOGRAD, N
[J]. JOURNAL OF CHEMICAL PHYSICS, 1982, 76 (01) : 684 - 695
[4] Liu Shun-Wei, UNPUB
[5] ABLATIVE PHOTO-DECOMPOSITION - ACTION OF FAR ULTRAVIOLET (193-NM) LASER-RADIATION ON POLY(ETHYLENE-TEREPHTHALATE) FILMS
SRINIVASAN, R
LEIGH, WJ
[J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1982, 104 (24) : 6784 - 6785
[6] KINETICS OF THE ABLATIVE PHOTO-DECOMPOSITION OF ORGANIC POLYMERS IN THE FAR ULTRAVIOLET (193 NM)
SRINIVASAN, R
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04): : 923 - 926
[7] SELF-DEVELOPING PHOTOETCHING OF POLY(ETHYLENE-TEREPHTHALATE) FILMS BY FAR ULTRAVIOLET EXCIMER LASER-RADIATION
SRINIVASAN, R
MAYNEBANTON, V
[J]. APPLIED PHYSICS LETTERS, 1982, 41 (06) : 576 - 578
[8] SRINIVASAN R, J POLYM SCI
[9] ANGULAR-DISTRIBUTIONS OF EJECTED PARTICLES FROM ION-BOMBARDED CLEAN AND REACTED SINGLE-CRYSTAL SURFACES
WINOGRAD, N
GARRISON, BJ
HARRISON, DE
[J]. PHYSICAL REVIEW LETTERS, 1978, 41 (16) : 1120 - 1123
[10] 1964, ENCY POLYM SCI TECHN, V3