QUANTITATIVE MEASUREMENTS OF BEAM INDUCED CURRENT USING A SCANNING ELECTRON-MICROSCOPE ON SILICON PLANAR DEVICES

被引：0
作者：
BRESSE, JF [1 ]
机构：
[1] UNIV MONTPELLIER 2,CEA,CENG,LETI,F-34060 MONTPELLIER,FRANCE
来源：
JOURNAL DE MICROSCOPIE ET DE SPECTROSCOPIE ELECTRONIQUES | 1976年 / 1卷 / 04期
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：539 / 550
页数：12
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