REACTIVELY SPUTTER-DEPOSITED AND COEVAPORATED TEOX THIN-FILMS FOR OPTICAL-RECORDING

被引：12

作者：

LEE, WY

SEQUEDA, F

SALEM, J

LIM, G

DAVIS, CR

COUFAL, H

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期

关键词：

D O I：

10.1116/1.573884

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：553 / 557

页数：5

共 17 条

[1] SURFACE SEGREGATION IN BINARY SOLID-SOLUTIONS - A THEORETICAL AND EXPERIMENTAL PERSPECTIVE [J].

ABRAHAM, FF ;

BRUNDLE, CR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02) :506-519

[2]

AKAHIRA N, 1982, SPIE P, V329, P195

[3]

BUKETOV EA, 1964, RUSS J INORG CHEM, V9, P123

[4]

Coburn J. W., 1974, Japanese Journal of Applied Physics, P501

[5]

COUFAL H, 1984, LASER PROCESSING DIA, P25

[6]

COUFAL H, 1984, IBM RJ4447 RES REP

[7] OXIDES AND OXYACIDS OF TELLURIUM [J].

DUTTON, WA ;

COOPER, WC .

CHEMICAL REVIEWS, 1966, 66 (06) :657-&

[8]

DUTTON WA, 1971, TELLURIUM, P54

[9]

LEE WY, 1983, P SOC PHOTO-OPT INST, V420, P265

[10] DEGRADATION OF THIN TELLURIUM-FILMS [J].

LEE, WY ;

GEISS, RH .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (03) :1351-1357

← 1 2 →