A MICROSCOPIC INVESTIGATION ON SI ACTIVATION IN ION-IMPLANTED FURNACE ANNEALED LEC GAAS SUBSTRATES

被引：0
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作者：
PILLAN, M
VIDIMARI, F
EHRENHEIM, A
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来源：
SEMI-INSULATING III-V MATERIALS, MALMO 1988 | 1988年
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中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
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页码：87 / 92
页数：6
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