CHARACTERISTICS OF THE SYNTHESIS OF BETA-SIC BY THE IMPLANTATION OF CARBON-IONS INTO SILICON

被引：46
作者：
KIMURA, T
KAGIYAMA, S
YUGO, S
机构：
来源：
THIN SOLID FILMS | 1982年 / 94卷 / 03期
关键词：
D O I：
10.1016/0040-6090(82)90295-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：191 / 198
页数：8
相关论文
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