SIMPLIFIED 3-DIMENSIONAL COMPUTER-SIMULATION FORMULAS FOR FILM THICKNESS DISTRIBUTION IN THE LPCVD PROCESS

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作者：
WANG, JT
ZHANG, SL
WANG, YF
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SOLID-STATE ELECTRONICS | 1986年 / 29卷 / 10期
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码：999 / 1004
页数：6
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