INSITU SPECTROSCOPIC ELLIPSOMETRY - APPLICATION TO SB COVERAGE MEASUREMENT IN THE MONOLAYER RANGE ON SI(111)

被引：10

作者：

ANDRIEU, S ^{[1
]}

FERRIEU, F ^{[1
]}

DAVITAYA, FA ^{[1
]}

机构：

[1] INSTRUMENTS SA RIBER,F-92503 RUEIL MALMAISON,FRANCE

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1989年 / 49卷 / 06期

关键词：

D O I：

10.1007/BF00616999

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：719 / 722

页数：4

共 23 条

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