AN OPTICAL CHARACTERIZATION OF NATIVE OXIDES AND THIN THERMAL OXIDES ON SILICON

被引：46

作者：

PHILIPP, HR

TAFT, EA

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 07期

关键词：

D O I：

10.1063/1.331401

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：5224 / 5229

页数：6

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