REDUCED DAMAGE GENERATION IN GAAS IMPLANTED WITH FOCUSED BE IONS

被引:8
作者
BAMBA, Y
MIYAUCHI, E
ARIMOTO, H
TAKAMORI, A
HASHIMOTO, H
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1984年 / 23卷 / 07期
关键词
D O I
10.1143/JJAP.23.L515
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:L515 / L517
页数:3
相关论文
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