NUMERICAL-SIMULATION OF TRANSPORT PROCESSES IN VERTICAL CYLINDER EPITAXY REACTORS

被引：0

|

作者：

MANKE, CW

DONAGHEY, LF

机构：

[1] UNIV CALIF BERKELEY,LAWRENCE BERKELEY LAB,BERKELEY,CA 94720

[2] UNIV CALIF BERKELEY,DEPT CHEM ENGN,BERKELEY,CA 94720

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1977年 / 124卷 / 08期

关键词：

D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

收藏

页码：C296 / C296

页数：1

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