PROCESSES IN INTERFACIAL ZONES DURING CHEMICAL VAPOR-DEPOSITION - ASPECTS OF KINETICS, MECHANISMS, ADHESION AND SUBSTRATE ATOM TRANSPORT

被引：30
作者：
CARLSSON, JO
机构：
[1] Uppsala Univ, Solid State Chemistry, Group, Uppsala, Swed, Uppsala Univ, Solid State Chemistry Group, Uppsala, Swed
来源：
THIN SOLID FILMS | 1985年 / 130卷 / 3-4期
关键词：
The author is grateful to the Swedish Natural Science Research Council and the Swedish Board for Technical Development for support of work leading to this overview;
D O I：
10.1016/0040-6090(85)90358-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
62
引用
收藏
页码：261 / 282
页数：22
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