A NEW ION COUNTING SYSTEM DEVISED FOR MASS-SELECTIVE DETECTION OF SPUTTERED NEUTRALS IN LASER SNMS

被引：3

作者：

ICHIMURA, S

GOTO, K

KOKUBUN, K

SHIMIZU, H

MATSUURA, S

机构：

[1] HAMAMATSU PHOTON KK,TOYOOKA 43801,JAPAN

[2] NAGOYA INST TECHNOL,SHOWA KU,NAGOYA,AICHI 466,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1990年 / 29卷 / 07期

关键词：

Counting; Image processing; Laser; Postionization; Snms; Time of flight;

D O I：

10.1143/JJAP.29.L1209

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A new ion counting system was devised for time-of-flight mass detection in sputtered neutral mass spectrometry (SNMS), using a pulse laser for postionization. A microchannel plate (MCP) intensifier used as a detector was gated by a retarding grid in front of the MCP for particular masses. High peak-counting ability (exceeding 1010 counts per second) of the system for ionization with a laser pulse (20–30 ns) was maintained for mass-selective detection. The performance of the new counting system at a high count rate was analyzed, and the detection limit and the accuracy were discussed. © 1990 The Japan Society of Applied Physics.

引用

页码：L1209 / L1212

页数：4

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