INSITU GROWN YBA2CU3O7-D THIN-FILMS FROM SINGLE-TARGET MAGNETRON SPUTTERING

被引:351
作者
EOM, CB
SUN, JZ
YAMAMOTO, K
MARSHALL, AF
LUTHER, KE
GEBALLE, TH
LADERMAN, SS
机构
[1] STANFORD UNIV,CTR MAT RES,STANFORD,CA 94305
[2] STANFORD UNIV,DEPT APPL PHYS,STANFORD,CA 94305
[3] HEWLETT PACKARD CO,CIRCUIT TECHNOL RES & DEV,PALO ALTO,CA 94304
关键词
D O I
10.1063/1.102436
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:595 / 597
页数:3
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