GENERATION OF MICROPATTERNS IN POLY(3-METHYL-THIOPHENE) FILMS USING MICROLITHOGRAPHY - A 1ST STEP IN THE DESIGN OF AN TOTALLY ORGANIC THIN-FILM TRANSISTOR

被引：20
作者：
KOBEL, W
KIESS, H
EGLI, M
机构：
[1] Lab RCA Ltd, Zurich, Switz, Lab RCA Ltd, Zurich, Switz
来源：
SYNTHETIC METALS | 1988年 / 22卷 / 03期
关键词：
ELECTROCHEMISTRY - LITHOGRAPHY - PLASTICS FILMS - Applications - SEMICONDUCTING POLYMERS - Applications - SOLID STATE DEVICES; THIN FILM - Materials;
D O I：
10.1016/0379-6779(88)90224-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A thin-film transistor structure was designed using poly(3-methyl-thiophene) in its oxidized (highly conducting: sigma approximately equals 2 multiplied by 10**4 S/m) state as source and drain contacts, and the same material in its reduced (semiconducting: sigma approximately equals 10** minus **7 S/m) state as channel. The source, drain and channel zones can be defined by means of electrochemical and microlithographic procedures. The ultimate resolution is in the submicron range.
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收藏
页码：265 / 271
页数：7
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