GENERATION OF MICROPATTERNS IN POLY(3-METHYL-THIOPHENE) FILMS USING MICROLITHOGRAPHY - A 1ST STEP IN THE DESIGN OF AN TOTALLY ORGANIC THIN-FILM TRANSISTOR

被引：20

作者：

KOBEL, W

KIESS, H

EGLI, M

机构：

[1] Lab RCA Ltd, Zurich, Switz, Lab RCA Ltd, Zurich, Switz

来源：

SYNTHETIC METALS | 1988年 / 22卷 / 03期

关键词：

ELECTROCHEMISTRY - LITHOGRAPHY - PLASTICS FILMS - Applications - SEMICONDUCTING POLYMERS - Applications - SOLID STATE DEVICES; THIN FILM - Materials;

D O I：

10.1016/0379-6779(88)90224-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A thin-film transistor structure was designed using poly(3-methyl-thiophene) in its oxidized (highly conducting: sigma approximately equals 2 multiplied by 10**4 S/m) state as source and drain contacts, and the same material in its reduced (semiconducting: sigma approximately equals 10** minus **7 S/m) state as channel. The source, drain and channel zones can be defined by means of electrochemical and microlithographic procedures. The ultimate resolution is in the submicron range.

引用

页码：265 / 271

页数：7

共 14 条

[1] SOLID-STATE MICROELECTROCHEMISTRY - ELECTRICAL CHARACTERISTICS OF A SOLID-STATE MICROELECTROCHEMICAL TRANSISTOR BASED ON POLY(3-METHYLTHIOPHENE) [J].