NEW DEFLECTED-BEAM GAUGE FOR PRESSURES BELOW 10-12 TORR

被引:14
作者
BLECHSCHMIDT, D [1 ]
机构
[1] CERN,1211 GENEVA,SWITZERLAND
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 05期
关键词
D O I
10.1116/1.568464
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1072 / 1078
页数:7
相关论文
共 16 条
[1]   TUNGSTEN EVAPORATION LIMIT OF HOT-CATHODE IONIZATION GAUGES [J].
ANGERTH, B ;
HULEK, Z .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01) :461-465
[2]  
BENVENUTI C, 1974, JPN J APPL PHYS, P77
[3]   MINIATURE EXTRACTOR GAUGE FOR UHV [J].
BLECHSCHMIDT, D .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (06) :1160-1165
[4]  
BLECHSCHMIDT D, 1974, JPN J APPL PHYS, P105
[5]   IONIZATION GAUGE USING A CHANNEL ELECTRON MULTIPLIER FOR PRESSURES BELOW 10-12 TORR [J].
BLECHSCHMIDT, D .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (02) :376-380
[6]  
FISCHER E, 1974, JPN J APPL PHYS, P199
[7]  
FISCHER E, 1972, J VAC SCI T, V9, P1603
[8]   ELECTRON-ORBIT ION GAUGE - ULTRA-HIGH VACUUM GAUGE [J].
FITCH, RK ;
RUSHTON, GJ .
VACUUM, 1971, 21 (10) :453-&
[9]   ION GAUGE FOR VACUUM PRESSURE MEASUREMENTS BELOW 1 X 10-10 TORR [J].
HELMER, JC ;
HAYWARD, WH .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1966, 37 (12) :1652-&
[10]   MEASUREMENTS WITH MODULATED BAYARD-ALPERT GAUGE IN ALUMINOSILICATE GLASS AT PRESSURES BELOW 10-12 TORR [J].
HOBSON, JP .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1964, 1 (01) :1-&