SPUTTERING OF SOLID NEON BY KEV HYDROGEN-IONS

被引：27
作者：
ELLEGAARD, O
SCHOU, J
SORENSEN, H
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 13卷 / 1-3期
关键词：
D O I：
10.1016/0168-583X(86)90567-7
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：567 / 571
页数：5
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