CALCULATION OF THE IONIZATION RATE AND ELECTRON-TRANSPORT COEFFICIENTS IN AN ARGON RF DISCHARGE

The behavior of an rf discharge can be modeled by using a fluid approach. For this approach, the values of the mobility and diffusion coefficients as well as the ionization rate are necessary. These values are often obtained by extrapolating the data of dc Townsend discharges. To check whether this is justified we computed the coefficients for electrons in an rf discharge by using a kinetic model based on a two-term approximation of the electron energy distribution function. The calculated electron mobility and electron diffusion coefficients agree reasonably well with the extrapolated Townsend values. Significant deviations were found between the extrapolated Townsend ionization rate and the computed rf ionization rate as a function of the reduced electric field.