共 50 条
- [13] ELECTRON-BEAM PATTERN WRITER FOR X-RAY MASKS PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1984, 448 : 130 - 138
- [15] ELECTRON-BEAM INSPECTION TECHNOLOGY FOR X-RAY MASKS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (01): : 146 - 149
- [16] Electron microscopic observations and X-ray microanalysis of a multinucleated giant cell JOURNAL OF ELECTRON MICROSCOPY, 1998, 47 (04): : 359 - 361
- [17] Positive resists for electron-beam and X-ray lithography APEIE-98: 1998 4TH INTERNATIONAL CONFERENCE ON ACTUAL PROBLEMS OF ELECTRONIC INSTRUMENT ENGINEERING PROCEEDINGS, VOL 1, 1998, : 81 - 82