NEAR-SURFACE DAMAGE INDUCED IN POLYIMIDES BY ION-BEAM ETCHING

被引：8

作者：

VANDERLINDE, WE ^{[1
]}

MILLS, PJ ^{[1
]}

KRAMER, EJ ^{[1
]}

RUOFF, AL ^{[1
]}

机构：

[1] CORNELL UNIV,CTR MAT SCI,ITHACA,NY 14853

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 05期

关键词：

D O I：

10.1116/1.582994

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1362 / 1364

页数：3

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