ELECTRON-INDUCED CHEMICAL VAPOR-DEPOSITION BY REACTIONS INDUCED IN ADSORBED MOLECULAR LAYERS

被引：14

作者：

BOZSO, F

AVOURIS, P

机构：

来源：

APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 12期

关键词：

D O I：

10.1063/1.100655

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1095 / 1097

页数：3

共 19 条

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