OPTICAL MEASUREMENT OF THE REFRACTIVE-INDEX, LAYER THICKNESS, AND VOLUME CHANGES OF THIN-FILMS

被引:21
作者
HOLTSLAG, AHM
SCHOLTE, PMLO
机构
来源
APPLIED OPTICS | 1989年 / 28卷 / 23期
关键词
D O I
10.1364/AO.28.005095
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
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页码:5095 / 5104
页数:10
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共 13 条
[1]   DIELECTRIC FUNCTIONS AND OPTICAL-PARAMETERS OF SI, GE, GAP, GAAS, GASB, INP, INAS, AND INSB FROM 1.5 TO 6.0 EV [J].
ASPNES, DE ;
STUDNA, AA .
PHYSICAL REVIEW B, 1983, 27 (02) :985-1009
[2]  
Born M., 1980, PRINCIPLES OPTICS, V6th, P109
[3]  
BOUWHUIS G, 1986, PRINCIPLES OPTICAL D
[4]   ALGEBRAIC-METHOD FOR EXTRACTING THIN-FILM OPTICAL-PARAMETERS FROM SPECTROPHOTOMETER MEASUREMENTS [J].
CASE, WE .
APPLIED OPTICS, 1983, 22 (12) :1832-1836
[5]   OPTICAL-CONSTANT DETERMINATIONS OF THIN-FILMS BY A RANDOM SEARCH METHOD [J].
CHANG, M ;
GIBSON, UJ .
APPLIED OPTICS, 1985, 24 (04) :504-507
[6]  
GRAVESTEIJN DJ, 1988, APPL OPTICS, V26, P4772
[7]   STRESSES IN SILICON-CRYSTALS FROM ION-IMPLANTED AMORPHOUS REGIONS [J].
HORA, H .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 32 (04) :217-221
[8]   SIMPLE METHOD FOR DETERMINATION OF OPTICAL-CONSTANTS N,K AND THICKNESS OF A WEAKLY ABSORBING THIN-FILM [J].
MANIFACIER, JC ;
GASIOT, J ;
FILLARD, JP .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1976, 9 (11) :1002-1004
[9]   DISTRIBUTION OF LIGHT AT AND NEAR THE FOCUS OF HIGH-NUMERICAL-APERTURE OBJECTIVES [J].
MANSURIPUR, M .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1986, 3 (12) :2086-2093
[10]   OPTICAL PROPERTIES OF AMORPHOUS 3-5 COMPOUNDS .1. EXPERIMENT [J].
STUKE, J ;
ZIMMERER, G .
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 1972, 49 (02) :513-+