SEMICONDUCTOR PROCESSING WITH EXCIMER LASERS

被引：0

|

作者：

YOUNG, RT

NARAYAN, J

CHRISTIE, WH

VANDERLEEDEN, GA

ROTHE, DE

CHENG, LJ

机构：

[1] OAK RIDGE NATL LAB, OAK RIDGE, TN 37830 USA

[2] CALTECH, JET PROP LAB, PASADENA, CA 91103 USA

来源：

AIP CONFERENCE PROCEEDINGS | 1983年 / 100期

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D O I：

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中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：266 / 278

页数：13

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