GLOW-DISCHARGE OPTICAL SPECTROSCOPY AS AN ANALYTICAL DEPTH PROFILING TECHNIQUE

被引：17

作者：

GREENE, JE

SEQUEDAOSORIO, F

NATARAJAN, BR

机构：

[1] UNIV ILLINOIS,DEPT MET,URBANA,IL 61801

[2] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 01期

关键词：

D O I：

10.1116/1.568792

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：366 / 369

页数：4

共 50 条

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