SEMICONDUCTOR SURFACE SPECTROSCOPIES - THE EARLY YEARS

被引:43
作者
LAGOWSKI, J
机构
[1] Center for Microelectronics Research, University of South Florida, Tampa
关键词
D O I
10.1016/0039-6028(94)90648-3
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In the Fall of 1970, Chester Lee Balestra, a graduate student working in Harry Gates' laboratory at the Massachusetts Institute of Technology, observed a strong photovoltaic signal on CdS surfaces illuminated with a sub-bandgap light. Part of the photovoltage spectrum disappeared for surfaces cleaved in ultra-high vacuum and reappeared at higher ambient pressure, implying the involvement of surface states. A corresponding technique, ''surface photovoltage spectroscopy'', was developed and used for studying a wide range of surface-related phenomena in semiconductors. Two decades later, the spin-off techniques are used on silicon IC fabrication lines for instantaneous, non-contact detection of metal contaminants with an astounding sensitivity of one part per quadrillion.
引用
收藏
页码:92 / 101
页数:10
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