SURFACE INSTABILITIES OF EPITAXIAL-FILMS ON A SUBSTRATE

被引:18
作者
JUNQUA, N
GRILHE, J
机构
来源
JOURNAL DE PHYSIQUE III | 1993年 / 3卷 / 08期
关键词
D O I
10.1051/jp3:1993222
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The energy variation of an epitaxial film on a substrate is calculated when sinusoidal roughness appears at the surface, using die method of the surface dislocation model. The energy variation is negative beyond a critical value of wavelength which depends on the thickness of the film and on the ratio of the shear moduli of substrate and film. The kinetic of roughness development during film growing are discussed.
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页码:1589 / 1601
页数:13
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