THE USE OF NONLINEAR CHARACTERISTICS OF A LATTICE FRINGE IMAGE FOR THE CHARACTERIZATION OF IMAGING PARAMETERS

被引:7
作者
HYTCH, MJ [1 ]
STOBBS, WM [1 ]
机构
[1] UNIV CAMBRIDGE,DEPT MAT SCI & MET,CAMBRIDGE CB2 3QZ,CAMBS,ENGLAND
关键词
D O I
10.1016/0304-3991(94)90105-8
中图分类号
TH742 [显微镜];
学科分类号
摘要
A way of determining HREM experimental parameters from the analysis of non-linear interference is described. Thickness, defocus, beam divergence and isotropic specimen vibration can all be determined for relatively broad ranging characteristics of the material examined, the specific example treated here being [001] AlxGa1-xAs. For structures of a certain two-dimensional symmetry in projection, quantitative information concerning the misalignments can also be obtained.
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页码:63 / 72
页数:10
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