ENHANCED SOLUBILITY OF IMPURITIES AND ENHANCED DIFFUSION NEAR CRYSTAL-SURFACES

被引：159
作者：
TERSOFF, J
机构：
[1] IBM Research Division, Thomas J. Watson Research Center, Yorktown Heights
来源：
PHYSICAL REVIEW LETTERS | 1995年 / 74卷 / 25期
关键词：
D O I：
10.1103/PhysRevLett.74.5080
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Any defect or impurity has some inherent stress, so near a free surface its energy is reduced by relief of this stress. The defect stress also couples to the intrinsic surface stress. In general, the result is to enhance impurity solubility and diffusion near the surface. With certain assumptions regarding the kinetics, the high impurity density near the surface can be frozen in as the crystal grows, permitting the growth of highly supersaturated solid solutions, e.g., high dopant concentrations in semiconductors. Calculations for carbon near the Si(001) surface illustrate the solubility enhancement. © 1995 The American Physical Society.
引用
收藏
页码：5080 / 5083
页数：4
相关论文
共 23 条
[1]   PRESSURE EFFECTS ON SELF-DIFFUSION IN SILICON [J].
ANTONELLI, A ;
BERNHOLC, J .
PHYSICAL REVIEW B, 1989, 40 (15) :10643-10646
[2]   1ST-PRINCIPLES CALCULATIONS OF SELF-DIFFUSION CONSTANTS IN SILICON [J].
BLOCHL, PE ;
SMARGIASSI, E ;
CAR, R ;
LAKS, DB ;
ANDREONI, W ;
PANTELIDES, ST .
PHYSICAL REVIEW LETTERS, 1993, 70 (16) :2435-2438
[3]   THE ENERGETICS OF ADATOMS ON THE SI(100) SURFACE [J].
BROCKS, G ;
KELLY, PJ ;
CAR, R .
SURFACE SCIENCE, 1992, 269 :860-866
[4]   MICROSCOPIC THEORY OF ATOMIC DIFFUSION MECHANISMS IN SILICON [J].
CAR, R ;
KELLY, PJ ;
OSHIYAMA, A ;
PANTELIDES, ST .
PHYSICAL REVIEW LETTERS, 1984, 52 (20) :1814-1817
[5]   DIFFUSION PATH FOR AN AL ADATOM ON AL(001) [J].
FEIBELMAN, PJ .
PHYSICAL REVIEW LETTERS, 1990, 65 (06) :729-732
[6]   SYNTHESIS OF SI1-YCY ALLOYS BY MOLECULAR-BEAM EPITAXY [J].
IYER, SS ;
EBERL, K ;
GOORSKY, MS ;
LEGOUES, FK ;
TSANG, JC ;
CARDONE, F .
APPLIED PHYSICS LETTERS, 1992, 60 (03) :356-358
[7]   EQUILIBRIUM ALLOY PROPERTIES BY DIRECT SIMULATION - OSCILLATORY SEGREGATION AT THE SI-GE(100) 2X1 SURFACE [J].
KELIRES, PC ;
TERSOFF, J .
PHYSICAL REVIEW LETTERS, 1989, 63 (11) :1164-1167
[8]  
KELLY SJ, 1986, ALCOHOL CLIN EXP RES, V10, P115
[9]  
KITTEL C, 1980, THERMAL PHYSICS
[10]   SURFACE-STRESS-INDUCED ORDER IN SIGE ALLOY-FILMS [J].
LEGOUES, FK ;
KESAN, VP ;
IYER, SS ;
TERSOFF, J ;
TROMP, R .
PHYSICAL REVIEW LETTERS, 1990, 64 (17) :2038-2041
123