Multi-Mode Vibration Suppression in MIMO Systems by Extending the Zero Placement Input Shaping Technique: Applications to a 3-DOF Piezoelectric Tube Actuator

被引:10
作者
Al Hamidi, Yasser [1 ,2 ,3 ]
Rakotondrabe, Micky [2 ,3 ]
机构
[1] Texas A&M Univ Qatar, POB 23874, Doha, Qatar
[2] FEMTO ST Inst, Automat Control & Micromechatron Syst Dept, 24 Rue Alain Savary, F-25000 Besancon, France
[3] Univ Franche Comte, ENSMM, UTBM, CNRS UMR6174, 24 Rue Alain Savary, F-25000 Besancon, France
关键词
input shaping; vibration; feedforward; actuators; piezoelectric; piezotube;
D O I
10.3390/act5020013
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Piezoelectric tube actuators are extensively used in scanning probe microscopes to provide dynamic scanning motions in open-loop operations. Furthermore, they are employed as micropositioners due to their high bandwidth, high resolution and ease of excitation. However, these piezoelectric micropositioners exhibit badly damped vibrations that occur when the input excites the dynamic response, which tends to degrade positioning accuracy and performance. This paper deals with vibrations' feedforward control of a multi-degrees of freedom (DOF) piezoelectric micropositioner in order to damp the vibrations in the direct axes and to reduce the cross-couplings. The novelty in this paper relative to the existing vibrations feedforward controls is the simplicity in design approach, the minimal number of shaper impulses for each input required to damp all modes of vibration at each output, and the account for the strong cross-couplings which only occur in multi-DOF cases. A generalization to a multiple degrees of freedom actuator is first proposed. Then simulation runs on a 3-DOF piezoelectric tube micropositioner have been effectuated to demonstrate the efficiency of the proposed method. Finally, experimental tests were carried out to validate and to confirm the predicted simulation.
引用
收藏
页数:13
相关论文
共 28 条
[1]  
Abramovitch D.Y., 2007, P AM CONTR C
[2]   Robotic microassembly and micromanipulation at FEMTO-ST [J].
Agnus J. ;
Chaillet N. ;
Clévy C. ;
Dembélé S. ;
Gauthier M. ;
Haddab Y. ;
Laurent G. ;
Lutz P. ;
Piat N. ;
Rabenorosoa K. ;
Rakotondrabe M. ;
Tamadazte B. .
Lutz, P. (philippe.lutz@femto-st.fr), 1600, Springer Verlag (08) :91-106
[3]  
Agnus J., 2002, french patent, Patent No. [FR0211934, 0211934]
[4]  
Al Hamidi Y., 2015, P SPIE, V9494
[5]   SOLUTIONS TO POINT-TO-POINT CONTROL-PROBLEMS USING LAPLACE TRANSFORM TECHNIQUE [J].
BHAT, SP ;
MIU, DK .
JOURNAL OF DYNAMIC SYSTEMS MEASUREMENT AND CONTROL-TRANSACTIONS OF THE ASME, 1991, 113 (03) :425-431
[6]   ATOMIC FORCE MICROSCOPE [J].
BINNIG, G ;
QUATE, CF ;
GERBER, C .
PHYSICAL REVIEW LETTERS, 1986, 56 (09) :930-933
[7]   Creep, hysteresis, and vibration compensation for piezoactuators: Atomic force microscopy application [J].
Croft, D ;
Shed, G ;
Devasia, S .
JOURNAL OF DYNAMIC SYSTEMS MEASUREMENT AND CONTROL-TRANSACTIONS OF THE ASME, 2001, 123 (01) :35-43
[8]  
Das S.K., 2014, IEEE T CONTROL SYST
[9]   A survey of control issues in nanopositioning [J].
Devasia, Santosh ;
Eleftheriou, Evangelos ;
Moheimani, S. O. Reza .
IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, 2007, 15 (05) :802-823
[10]  
Habineza D., 2015, P SPIE, P9494