ATOMIC LAYER EPITAXY OF III-V BINARY COMPOUNDS

被引：125

作者：

BEDAIR, SM

TISCHLER, MA

KATSUYAMA, T

ELMASRY, NA

机构：

来源：

APPLIED PHYSICS LETTERS | 1985年 / 47卷 / 01期

关键词：

D O I：

10.1063/1.96401

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：51 / 53

页数：3

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