SELECTIVE THERMALIZATION IN SPUTTERING TO PRODUCE HIGH TC FILMS

被引:63
作者
CADIEU, FJ [1 ]
CHENCINSKI, N [1 ]
机构
[1] CITY UNIV NEW YORK,QUEENS COLL,FLUSHING,NY 11367
关键词
D O I
10.1109/TMAG.1975.1058634
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:227 / 230
页数:4
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