INTERFEROMETRIC MEASUREMENT OF MOTION ERRORS OF AIR-BEARING-SUPPORTED SPINDLES AND CARRIAGES FOR HIGH-PRECISION MACHINE-TOOLS

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作者：
LANGENBECK, P
机构：
来源：
F&M-FEINWERKTECHNIK & MESSTECHNIK | 1983年 / 91卷 / 03期
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T [工业技术];
学科分类号：
08 ;
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页码：134 / 136
页数：3
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