REACTIVE STICKING COEFFICIENT OF SILANE ON THE SI(111)-(7X7) SURFACE

被引：62

作者：

GATES, SM

GREENLIEF, CM

BEACH, DB

KUNZ, RR

机构：

来源：

CHEMICAL PHYSICS LETTERS | 1989年 / 154卷 / 06期

关键词：

D O I：

10.1016/0009-2614(89)87141-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：505 / 510

页数：6

共 19 条

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[6]

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