RADIATION-DAMAGE IN SIO2/SI INDUCED BY VUV PHOTONS

被引：122

作者：

YUNOGAMI, T

MIZUTANI, T

SUZUKI, K

NISHIMATSU, S

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 10期

关键词：

D O I：

10.1143/JJAP.28.2172

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2172 / 2176

页数：5

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