INSITU LASER-LIGHT SCATTERING .2. RELATIONSHIP TO SILICON SURFACE-TOPOGRAPHY

被引：18
作者：
PIDDUCK, AJ
ROBBINS, DJ
GASSON, DB
PICKERING, C
GLASPER, JL
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 10期
关键词：
D O I：
10.1149/1.2096406
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
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页码：3088 / 3094
页数：7
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