A STUDY OF SHALLOW AND DEEP DAMAGE IN CU AFTER IMPLANTATION OF 100 KEV CU AND AG IONS

被引：3

作者：

LINDGREEN, RJT

BOERMA, DO

DEHOSSON, JTM

机构：

[1] UNIV GRONINGEN,CTR MAT SCI,9718 CM GRONINGEN,NETHERLANDS

[2] STATE UNIV GRONINGEN,CTR MAT SCI,9747 AG GRONINGEN,NETHERLANDS

[3] STATE UNIV GRONINGEN,DEPT APPL PHYS,9747 AG GRONINGEN,NETHERLANDS

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期

关键词：

D O I：

10.1016/0167-5087(83)90906-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：963 / 967

页数：5

共 14 条

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