ALKALI ION DOPING OF SILICON

被引:22
作者
MCCALDIN, JO
WIDMER, AE
机构
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D O I
10.1109/PROC.1964.2875
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:301 / &
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