REALIZATION OF POROUS SILICON MEMBRANES FOR GAS SENSOR APPLICATIONS

被引：35

作者：

TALIERCIO, T

DILHAN, M

MASSONE, E

GUE, AM

FRAISSE, B

FOUCARAN, A

机构：

[1] CITA,F-31700 BLAGNAC,FRANCE

[2] CNRS,LAAS,F-31077 TOULOUSE,FRANCE

[3] UNIV MONTPELLIER 2,LAMMI,F-34095 MONTPELLIER 5,FRANCE

来源：

THIN SOLID FILMS | 1995年 / 255卷 / 1-2期

关键词：

DIFFUSION; SENSORS; SILICON; X-RAY DIFFRACTION;

D O I：

10.1016/0040-6090(94)05616-L

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this paper we report on the elaboration of porous silicon membranes for gas sensor applications. We attempted to replace the Teflon membrane of an oxygen sensor by a porous silicon membrane. The sensor was originally designed to measure the concentration of oxygen dissolved in aqueous solutions and had to be slightly modified. Diffusion times in the range of 10 min have been found.

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页码：310 / 312

页数：3

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