A PRECISE AND AUTOMATIC VERY LARGE-SCALE INTEGRATED-CIRCUIT PATTERN LINEWIDTH MEASUREMENT METHOD USING A SCANNING ELECTRON-MICROSCOPE

被引：16

作者：

MIYOSHI, M

KANOH, M

YAMAJI, H

OKUMURA, K

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 02期

关键词：

D O I：

10.1116/1.583408

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：493 / 499

页数：7

共 13 条

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ROBINSON, VNE
[J]. JOURNAL OF MICROSCOPY-OXFORD, 1975, 105 (DEC): : 289 - 298
[3] JENSEN S, 1980, SCANNING ELECTRON MI, V1, P393
[4] KAWAMOTO H, 1984, SCANNING ELECTRON MI, V1, P15
[5] MIYOSHI M, 1982, SCANNING ELECTRON MI, V4, P1507
[6] MEASUREMENTS OF DEEP PENETRATION OF LOW-ENERGY ELECTRONS INTO METAL-OXIDE-SEMICONDUCTOR STRUCTURE
NAKAMAE, K
FUJIOKA, H
URA, K
[J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (03) : 1306 - 1308
[7] Nyyssonen D., 1979, Proceedings of the Society of Photo-Optical Instrumentation Engineers, V194, P34
[8] POSTEK MT, 1984, SCANNING ELECTRON MI, V3, P1065
[9] RUSSELL PE, 1984, P SOC PHOTO-OPT INST, V480, P101, DOI 10.1117/12.943054
[10] SMOOTHING + DIFFERENTIATION OF DATA BY SIMPLIFIED LEAST SQUARES PROCEDURES
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GOLAY, MJE
[J]. ANALYTICAL CHEMISTRY, 1964, 36 (08) : 1627 - &